JEOL JAMP-9500F FE-Auger
The field emission Auger microprobe is a high-sensitivity instrument for surface analysis. It has very high spatial resolution, with a minimum probe diameter of 8nm, and high energy resolution. Using a hemispherical electrostatic energy analyser with a large acceptance angle and a multi-channel detector, elements can be detected with concentrations as low as 0.2 atomic%, although higher concentrations are required for accurate quantification.
An incorporated SEM provides images of the sample and an EDXS detector provides quick preview analysis allowing precise selection of the location for point spectra, line scans, depth profiling, and Auger image mapping. EDXS is a very unusual capability in an Auger instrument; this JAMP was the first where an EDXS detector was successfully installed, overcoming challenges of the UHV environment.
Selected volumes can be milled away with the in-situ ion gun, allowing depth profiling to a depth of a few hundred nanometres. The ion beam can also be used to remove contamination and to neutralize surface charging for non-conductive samples.