FEI Magellan 400
The FEI Magellan 400, an extreme high-resolution SEM with sub-nanometer resolution, operates at 1 to 30keV. An in-situ plasma cleaner and a liquid nitrogen cold finger allow for the analysis of highly labile and sensitive materials. SEM analysis of non-conductive materials, carried out at low beam energies, enables characterization of sub-nanometer surface structures. Novel detectors such as the high collection efficiency in-lens detector and a unique low voltage, high contrast solid state detector, combined with a two-mode objective lens with beam deceleration and immersion capabilities, provide high surface sensitivity, high resolution and enhanced contrast at low voltages.
JEOL JSM-7000F
The JEOL JSM-7000F equipped with a Schottky field emission gun offers high resolution and large probe currents at small probe diameters permitting characterization of nano-scale structures. A multipurpose specimen chamber, motorized specimen stage, single-action specimen exchange and an ideal geometry for techniques such as energy dispersive spectroscopy, electron backscattered diffraction and e-beam lithography are also features of this instrument. Resolutions of 1.2nm at 30keV and 3.0nm at 1keV make it an ideal instrument for the study of nano-scale non-conductive materials, polymers, ceramics and semi-conductors. Integrated Oxford Instruments X-Maxn 50 mm2 EDS detector and Nordlys II EBSD Camera with AZtec EDS/EBSD software plus HKL Channel EBSD post-processing software for the simultaneous acquisition of elemental (Boron and higher Z-number elements) and crystal orientation data, permitting a complete characterization of poly-phase samples.
JEOL 6610LV
The JEOL 6610LV is a tungsten filament equipped SEM with selectable low vacuum mode that allows for the analysis of non-conductive specimens without the need for heavy-metal coating. It has a large chamber which enables observation of specimens up to 200mm in diameter. With a resolution of 3.0nm at 30keV it is possible to view secondary electron and backscattered composition images simultaneously, which allows the user to contrast and compare specific details of the sample while carrying out EDS analysis.
Quattro S ESEM
The Thermo Scientific Quattro ESEM, environmental SEM allows for the study of materials in a range of conditions, such as metals, natural state materials (ESEM), hot, wet/humid, or reactive. It supports cooling and heating experiments both in high vacuum and low vacuum to accommodate the widest range of study environments. Due to its chamber size the Quattro, allows various accessories to be used for in-situ experiments, wet materials are possible with the Peltier cooling stage.
Elemental information can be obtained with Thermo Scientific ChemiSEM Technology, which provides live, quantitative, elemental mapping with SEM software. Thermofisher Pathfinder EDS system and X-ray microanalysis can be used for fast and excellent analysis of non-conductive samples: accurate EDS in high vacuum and low vacuum with the Quattro ESEM’s through-the-lens pumping.
- Resolution:
- 0.8 nm at 30 kV (STEM) in high vacuum
- 1.0 nm at 30 kV (SE) in high vacuum
- 1.3 nm at 30 kV (SE) in low vacuum and ESEM mode
- 3.0 nm at 1 kV (SE)
- ETD, low-vacuum SED (LVD), gaseous SED for ESEM mode (GSED), IR camera
- Nav-Cam+, DBS, DBS-GAD, ESEM-GAD
- Live quantitative SEM image coloring is available based on energy-dispersive X-ray spectroscopy (EDS). Point & ID, linescan, region, element maps.
- Stage bias (beam deceleration): -4000 V to +50 V
- Low vacuum mode: Up to 2600 Pa (H2O) or 4000 Pa (N2)
- Stage: 5-axis motorized eucentric stage, 110 x 110 mm² with a 105° tilt range.
- Maximum sample weight: 5 kg in un-tilted position.
- Standard sample holder and standard multi-sample SEM holder uniquely mounts directly onto the stage, hosts up to 18 standard stubs (12 mm), does not require tools to mount the samples
- Chamber: 340 mm inside width, Tilt: -15° – 90°, X: -55mm – +55mm Y: -55mm – +55mm
- In situ accessories:
- Software controlled: Peltier cold stage
Software controlled: low vacuum/ESEM heating stage
Software controlled: high vacuum heating stage
- Software controlled: Peltier cold stage
TESCAN VP. SEM
The TESCAN VEGA-II LSU SEM is a variable pressure SEM equipped with a tungsten filament. Conductive samples are viewed via a high vacuum mode while non-conductive samples can be viewed under low vacuum conditions. The microscope has a large chamber and an IR chamber CCD camera to allow viewing inside the chamber during use and the stage holds 7 stubs (13mm diameter) at one time and allows for 360 degree rotation and 50 degree tilt . SE and BSE imaging can be done simultaneously and a Peltier cooling stage is available (temperature control to -500C). The microscope is equipped with an X-MAX 80mm2 EDS detector and INCA software.
