Instruments

CCEM strives to push the cutting edge of materials characterization that best enables strategically important materials breakthroughs. We can accomplish this through our unique suite of instrumentation from electron and ion microscopes, and our dedicated staff. All users have the opportunity to be trained on any instrument at CCEM.

TEM

Expandable List

Description:

  • The TFS Spectra Ultra is an ultra-high-resolution, double-corrected HRTEM/STEM that operates at 30, 60, 200, and 300 keV.

Features:

  • X-FEG source and an ultimono monochromator (10 meV at 60 kV)
  • Ultra-X EDS detector
  • Cs Probe and Image corrector (STEM resolution: 0.5 A at 300 kV / Information limit: 0.7 A)
  • S-TWIN polepiece – constant thermal load, <15 min stabilization when switching kV’s
  • HAADF + Panther STEM segmented detectors (DPC / iDPC)
  • Tomography (Imaging/EDS)
  • 4D-STEM using Ceta S Detector
  • OptiSTEM+: automated corrector alignments
  • OptiMono+: automated monochromator alignments
  • Gatan ContinuumK3 GIF (EELS / EFTEM)

Applications:

  • Well suited for high-energy-resolution analytical work down to single atoms.

Contact: Carmen Andrei for more information.

Woman in a red jacket sitting in front of the Titan low base looking at two monitors to the right of the instrument.Description:

  • The Titan 80-300 LB is a high-resolution, image-corrected HRTEM/STEM that operates at 80 and 300 keV.

Features:

  • High-brightness source and a monochromator
  • Large-gap Cryo-Twin objective lens
  • CEOS hexapole aberration corrector on the image-forming lens
  • Gatan QuantumK2 GIF (0.8 eV resolution @300 kV)
  • Single- and double-tilt holders, tomography holder, cryo-holder, heating holder

Applications:

  • Suitable for high-energy-resolution analytical work including energy-filtered imaging
  • Cryogenic capability and option to acquire and analyze electron tomography data

Contact: Carmen Andrei for more information.

Description:

  • The Thermo Scientific Talos 200X is an analytical TEM and STEM equipped with an X-FEG source and an adjustable high tension between 80 and 200 kV.

Features:

  • Four in column SDD Super- X detectors for energy dispersive X-ray spectroscopy (EDS) signal detection
  • CMOS detector for EELS acquisition with a measured energy resolution of 0.65 eV
  • CETA 16M CMOS camera provides large area high framerate image acquisition capabilities
  • HRTEM with a resolution of 0.1 nm and STEM with a resolution of 0.16 nm
  • In-situ liquid and gas cell experiments
  • Equipped with Protochips Axon software

Applications:

  • Fastest and most precise EDS analysis in 2D and 3D

Contact: Carmen Andrei for more information.

Description:

  • The Thermo Scientific Talos L120C is a general purpose analytical TEM equipped with a LaB6 filament and an adjustable high tension between 20-120kV.

Features:

  • Bruker XFlash 6TI30 EDS detector provides chemical mapping capabilities
  • 4k CETA CMOS camera provides large area high framerate image acquisition capabilities
  • Bright field or dark field TEM (information limit 0.36 nm @ 120kV), diffraction and scanning transmission electron microscopy (STEM)

Applications:

  • Imaging of beam sensitive materials, metals and ceramics
  • Primary training instrument for TEM at the facility

Contact: Carmen Andrei for more information.

Nion Microscope with casing openDescription:

  • The Nion HERMES 100 is a STEM instrument equipped with a probe corrector, monochromator and spectrometer that allows imaging and spectroscopy with both high spatial and ultra-high energy resolution.

Features:

  • Operating voltages: 30keV, 60keV, 100keV
  • Spatial resolution (sub 1 A at 60 KV)
  • Energy resolution (sub 5 meV at 60 KV)
  • Single- and double-tilt holders

Applications:

  • Imaging specimens at atomic resolution
  • Identifying features through imaging, diffraction, and spectroscopy
  • Obtaining spatially resolved EELS maps

Contact: Brian Langelier for more information.

Jeol 1230 TEMDescription:

  • The JEOL 1230 is a very user friendly TEM equipped with a tungsten filament and an adjustable high tension between 60-120kV.

Features:

  • Quick grid exchange
  • Pole piece design provides excellent contrast for biological samples
  • Equipped with an AMT 4 megapixel digital camera

Applications:

  • Suitable for imaging of beam sensitive materials and low dose imaging

Contact: Marcia Reid for more information.

Scanning Electron Microscopes

Expandable List

Description:

  • The Apreo 2 S LoVac is a FEG-SEM with high resolution performance on a wide range of materials using both high and low vacuum.

Features:

  • Standard Everhart Thornley electron detector along with a Trinity Detection System
  • Operation modes include standard, Optiplan and immersion
  • Equipped with drift compensated frame integration
  • Beam deceleration can be used to enhance and modify imaging
  • Electron channeling contrast imaging (ECCI) module
  • Backscattered electron detector with CBS and ABS modes
  • Oxford Instruments Ultimax 170 mm EDS
  • Oxford Instrument Symmetry 3 EBSD

Applications:

  • Collecting information on the sample composition, morphology, and surface features
  • EBSD for electron crystallography

Contact: Chris Butcher for more information.

Description:

  • The FEI Magellan 400 is an extreme high-resolution SEM with sub-nanometer resolution.
  • Operates at 1 to 30keV.

Features:

  • In-situ plasma cleaner and a liquid nitrogen cold finger for analyzing highly labile and sensitive materials.
  • SEM analysis of non-conductive materials at low beam energies.
  • High collection efficiency in-lens detector and a unique low voltage, high contrast solid state detector.
  • Two-mode objective lens with beam deceleration and immersion capabilities.

Applications:

  • High surface sensitivity, high resolution, and enhanced contrast at low voltages.

Contact: Chris Butcher for more information.

Description:

  • The Thermo Scientific Quattro ESEM is an environmental SEM allowing for the study of materials in various conditions.

Features:

  • Supports cooling and heating experiments in high vacuum and low vacuum.
  • Chamber size allows for various in-situ experiments.
  • Elemental information obtained with Thermo Scientific ChemiSEM Technology.
  • Various detectors including ETD, low-vacuum SED (LVD), gaseous SED for ESEM mode (GSED), and IR camera.
  • Live quantitative SEM image coloring based on energy-dispersive X-ray spectroscopy (EDS).
  • Stage bias (beam deceleration): -4000 V to +50 V.
  • Low vacuum mode: Up to 2600 Pa (H2O) or 4000 Pa (N2).

Applications:

  • Imaging materials in a range of conditions.
  • Elemental mapping with SEM software.

Contact: Jhoynner Martinez for more information.

Jeol 6610 SEM sitting next to two monitors and control panel.Description:

  • The JEOL 6610LV is a tungsten filament equipped SEM with selectable low vacuum mode.

Features:

  • Large chamber enabling observation of specimens up to 200mm in diameter.
  • Resolution of 3.0nm at 30keV.

Applications:

  • Viewing secondary electron and backscattered composition images simultaneously.
  • EDS analysis.

Contact: Jhoynner Martinez for more information.

Tescan SEM sitting on the left of a desk with two monitors and the operating unit sitting to the right.Description:

  • The TESCAN VEGA-II LSU SEM is a variable pressure SEM equipped with a tungsten filament.

Features:

  • Conductive samples viewed via high vacuum mode, non-conductive samples under low vacuum conditions.
  • Stage holds 7 stubs (13mm diameter) at one time and allows for 360-degree rotation and 50-degree tilt.
  • Peltier cooling stage available.
  • SE and BSE imaging done simultaneously.
  • Equipped with an X-MAX 80mm2 EDS detector and INCA software.

Contact: Marcia Reid for more information.

Auger Spectrometer and SEM centered in the image.

Description:

  • The JEOL JAMP-9500F FE-Auger is a high-sensitivity instrument for surface analysis.
  • It offers very high spatial resolution with a minimum probe diameter of 8nm and high energy resolution.

Features:

  • Hemispherical electrostatic energy analyzer with a large acceptance angle
  • Multi-channel detector for element detection with concentrations as low as 0.2 atomic%
  • Incorporation of SEM for sample imaging
  • EDXS detector for quick preview analysis and precise location selection
  • In-situ ion gun for selective milling and depth profiling
  • Detection of elements with concentrations as low as 0.2 atomic%
  • Depth profiling to a depth of a few hundred nanometers
  • Removal of contamination and neutralization of surface charging for non-conductive samples using the ion gun

Applications:

  • Surface analysis with high sensitivity and spatial resolution
  • Depth profiling for material characterization
  • Contamination removal and surface charge neutralization for non-conductive samples

Contact: Travis Casagrande for more information.

Focused Ion Beam

Expandable List

Description:

  • The Helios 5 UC is a modern workhorse FIB targeted for typical FIB tasks such as cross-section analysis and sample preparation for TEM and APT.

Features:

  • Assortment of detectors: ETD, TLD, ICE, MD, ICD, many with backscattered electron modes
  • ThermoScientific Pathfinder EDS detector for EDS
  • MultiChem gas-delivery system enables site-specific deposition of tungsten, platinum, and carbon
  • Gas for selected carbon etching, Easy-lift for in-situ micromanipulation
  • High-precision piezo-driven stage with Z-range of 10 mm and tilt range of -10 to 60 degrees

Contact: Betty Huang for more information.

PFIB centered in the image with large black control panel in the background.Description:

  • The Helios 5 plasma focused ion beam (PFIB) provides the capacity to perform large area (up to 1 mm2) cross-sectioning, large 3D volume (up to 200 µm × 200 µm × 200 µm) characterization, and Ga+ free sample preparation by using an inductively coupled Xe+ plasma (ICP) source with an ion current that can reach as high as 2.5 µA.

Features:

  • Oxford Instruments Ultim Max 100 electron-dispersive X-ray spectroscopy (EDS)
  • Symmetry S2 electron backscatter diffraction (EBSD) detectors

Contact: Joseph Deering for more information.

Description:

  • The Crossbeam 350 at CCEM is fully-equipped to handle a wide variety of scenarios, highlighted by a femtosecond laser that enables massive volumes of material ablation in addition to all the full functionality of a FIB-SEM.

Features:

  • Femtosecond laser for massive volumes of material ablation
  • SE2 and InLens secondary electron detectors
  • In-column energy-selective backscattered (ESB) detector and retractable 4-quadrant annular backscattered electron detector
  • Gas-injection systems enable site-specific deposition of tungsten or carbon
  • Kleindiek MM3 micromanipulator with rotation for in-situ micromanipulation
  • Large Z-range stage, tilt ranges from -4 to 70 degrees
  • Leica cryo system with cold vacuum transfer capability
  • Fibics scan generator with Atlas 5 software
  • Correlation with 3D X-ray micro-CT data

Contact: Travis Casagrande for more information.

Description:

  • The Orion NanoFab is a dual beam instrument with two different FIB columns.

Features:

  • Primary is a gas field ion source (GFIS) column which uses either He or Ne
  • Second is a liquid metal ion source Ga column
  • When imaging with He ions, the Orion can achieve up to 0.5 nm imaging resolution with a depth of field 5-10x that of a normal field emission SEM
  • He ion beam capable of fine-scale milling and patterning (<10 nm)
  • Ne beam offers improved milling rate with a trade-off on resolution, Ga FIB beam useful for high rate material removal

Applications:

  • High resolution and high precision imaging, patterning, and advanced nanofabrication

Contact: Travis Casagrande for more information.

Atom Probe Tomography

Cameca LEAP 5000 XS

Description:

  • The Local Electrode Atom Probe (LEAP) 5000 XS from CAMECA Instruments Inc. is a high-resolution material analysis system that provides quantitative three-dimensional elemental and isotopic mapping with sub-nanometre resolution.

Features:

  • Wide field-of-view and improved ion optics for high-quality spatial resolutions
  • New detector technologies for unmatched multi-hit detection capabilities and detection efficiencies
  • Laser capabilities using an ultraviolet laser (355 nm wavelength) for expanded material range
  • Large range of pulse repetition rates for fast data acquisition times
  • Vacuum and Cryo Transfer Module (VCTM) enables analysis of cryogenic and/or air sensitive materials

    Field-evaporation of ions for material examination

  • Reconstruction of collected data to yield a 3D computer model of the material
  • Live-time mass-spectrum calibration and 3D data reconstruction for improved data quality
  • Equipped with CAMECA AP Suite 6 software for easy and efficient data analysis

Applications:

  • Characterization of dopants in semiconductors
  • Analysis of alloying elements in steels
  • Trace element segregation to interfaces and clusters
  • Isotope ratio measurements in minerals
  • Generation of 1D concentration profiles and 2D maps with atomic sensitivity

Contact: Gabe Arcuri for more information.

X-ray CT

Expandable List

Description:

  • The Nikon M2 225 KV CT is a high-performance X-ray computed tomography (CT) scanner with a maximum voltage of 225 kV and maximum power of 450 W.
  • Features a tungsten target X-ray source bombarded with high-energy electrons.
  • Provides fast and accurate 3D imaging of a wide range of materials, including metals, plastics, and composites, facilitating non-destructive testing, quality control, and materials research.
  • Offers a large field of view and a high-resolution detector for detailed examination of internal structure.

Specifications:

  • X-ray tube voltage: 50 – 225 kV
  • Detector type: flat-panel
  • Field of view: up to 300 mm in diameter and 500 mm in length
  • Magnification: geometric
  • Spatial resolution: up to 3 µm

Contact: Pardis Mohammadpour for more information.

XCT instrument with words saying Zeiss Versa 730Description:

  • The Zeiss VersaXRM 730 is a high-resolution 3D X-ray microscope designed for non-destructive imaging of various sample types and length scales, ranging from sub-micron to millimetre ranges.
  • Provides exceptional resolution performance (450 nm with maximum achievable voxel size of 40 nm) across an energy range of 30 kV to 160 kV, maximum 25 W.
  • The new ZEN NavX user interface helps users of all skill levels achieve fast, effective results with intuitive controls and smart parameter guidance for optimized workflows and efficiency.
  • Introducing FAST Mode for one-minute tomography with the Flat Panel Extension (FPX). By capturing X-ray images during continuous rotation, it eliminates step-and-shoot delays, resulting in significantly faster scans. Integrated with Volume Scout via ZEN NavX for end-to-end 3D navigation.
  • Equipped with dual-stage magnification feature using advanced synchrotron-calibre optics and RaaD™ (Resolution at a Distance) technology for high resolution even at large working distances.
  • Enables 3D crystallographic data retrieval through Laboratory-based Diffraction Contrast Tomography (LabDCT), offering insight into microstructure, texture, and strain of materials.
  • Utilizes AI-based reconstruction technology, ZEISS DeepRecon Pro, for faster throughput or higher quality images.

Specifications:

  • X-ray tube voltage: 30 – 160 kV
  • Detector type: Flat Panel Extension (FPX), objectives (0.4X, 4X, 20X, 40X-Prime)
  • Maximum field of view: up to 140 mm in diameter, 93 mm (single) and 165 mm (stitched) in height
  • Magnification: geometric, optical lens
  • Spatial resolution: 450 nm with maximum achievable voxel size of 40 nm
  • Maximum mass capacity: 25 kg

Contact: Pardis Mohammadpour for more information.

Virtual Resources

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The CCEM Data Server (commonly referred to as CCEMdata) is a secure, temporary online storage system managed by CCEM and McMaster University’s Research and High-Performance Computing Services (RHPCS) to facilitate the safe transfer, processing, and short/medium-term storage of scientific data generated at CCEM. It enables users to move datasets from instrument computers to personal storage devices, provides working space for analysis using CCEM virtual resources, and serves as a central repository for data produced through staff service requests. CCEMdata operates on the open-source Seafile platform. Requests to access CCEMdata are done by submitting the Virtual Resource Access form in Infinity.  Full setup instructions are available here.
Detailed terms of access are found in our Data Management and Cybersecurity Framework.

Contact: Facilities Manager for more information.

CCEM offers access to Virtual Machine (VM) workstations to provide users with remote access to high-performance computing resources and specialized microscopy software environments, enabling efficient post-processing and analysis of datasets generated at CCEM.These VMs are pre-configured with key software suites used in electron and X-ray microscopy, ensuring users can securely analyze and visualize their data from any location without the need for local installations or high-end hardware. Requests to access CCEM VMs are done by submitting the Virtual Resource Access form in Infinity. Full instructions are available here.
Detailed terms of access are found in our Data Management and Cybersecurity Framework.

Contact: Facilities Manager for more information.